30^th World Nano Conference

Biography

After an experience in industrial R&D, Bernard Pelissier integrated CNRS (French National Center for Scientific Research) in 1994. His research activities are mainly focused on material science and surface characterisation. He first worked on massive crystalline growth and MOCVD deposition and then integrated LTM (Laboratoire des Technologies de la Microélectronique) in 2001 as XPS surface characterisation manager. His research interest focused on materials fundamentals studies for process development and contamination studies in clean room. He has been involved in several European collaborative projects in surface characterisation. Since 2005 he is interested in quasi insitu physico-chemical characterisation using vacuum transfer. He actually manages the IMPACT Equipex project “A 300mm quasi insitu advanced characterisation platform combining pARXPS, Raman and ellipsometry using vacuum transfer”, dedicated to studies at the frontier between process development studies and upfront research.

Research Interest

materials fundamentals studies for process development and contamination studies in clean room and quasi insitu physico-chemical characterisation using vacuum transfer. He actually manages the IMPACT Equipex project “A 300mm quasi insitu advanced characterisation platform combining pARXPS, Raman and ellipsometry using vacuum transfer”, dedicated to studies at the frontier between process development studies and upfront research