Scientific Program

Conference Series Ltd invites all the participants across the globe to attend 30th World Nano Conference Zurich, Switzerland.

Day 1 :

OMICS International Nano 2019 International Conference Keynote Speaker Bernard Pelissier photo
Biography:

After an experience in industrial R&D, Bernard Pelissier integrated CNRS (French National Center for Scientific Research) in 1994. His research activities are mainly focused on material science and surface characterisation. He first worked on massive crystalline growth and MOCVD deposition and then integrated LTM (Laboratoire des Technologies de la Microélectronique) in 2001 as XPS surface characterisation manager. His research interest focused on materials fundamentals studies for process development and contamination studies in clean room. He has been involved in several European collaborative projects in surface characterisation. Since 2005 he is interested in quasi insitu physico chemical characterisation using vacuum transfer. He actually manages the IMPACT Equipex project “A 300mm quasi insitu advanced characterisation platform combining pARXPS, Raman and ellipsometry using vacuum transfer”, dedicated to studies at the frontier between process development studies and upfront research.

Abstract:

Selective deposition (ASD for Area Selective Deposition) processes are currently a very active topic of study in the microelectronic’s field. Indeed, this type of growth (bottom-up approach) allows to avoid problems of overlays or CD’s variability and mostly to lower costs compared to the classic top-down approaches requiring very complex developments when the dimensions are reduced: multipatterning, or Extreme UV. In this context a selective deposition process of TiO2 on TiN versus Si has been developed at lab [1]. This type of ASD deposition is based on alternating cycles of PEALD (Plasma Ehanced Atomic Layer Deposition) and phases of surface etching / passivation. In this scheme, these phases of passivation can avoid growth on intended areas for a certain number of cycles ALD. In order to understand and control the key steps in these processes during these successive deposit / engraving / passivation cycles, in-situ or quasi in-situ metrologies are valuable tools. They become mandatory when addressing surfaces presenting strong reactivity to air, as in this case here (TiN and Si). This concept of quasi in-situ analysis with mobile vacuum carrier [2] is one of the key facet of the IMPACT project and characterization platform, which has already been validated for many applications (various growth studies, reactive layers in plasma etching, surface functionalization,..) [3, 6]. Thus, after a synthetic description of the platform’s concept and setup the presentation will highlight this specific application for process development of PEALD selective deposition of TiO2 on TiN versus Si. In particular, the study will describe mechanisms involved for these selective growth cycles, and this at the level of the atomic layer, detailing each cycle from the first layers deposited.

 
 
 

 

OMICS International Nano 2019 International Conference Keynote Speaker Han-Yong Jeon photo
Biography:

Han-Yong Jeon is a Geosynthetics/Technical Organic Materials Researcher and he was the 32nd President of Korean Fiber Society (2014~2015). He has published more than 881 proceedings in domestic and international conferences. He wrote 20 texts including 'Geosynthetics’ and also published 144 papers in domestic and international journals. He has won the awards of Marquis Who's Who-Science and Engineering in 2003~2018 and also, he got the 33rd Academy Award of Korean Fiber Society in 2006 and “Excellent Paper Award of 2012” by The Korean Federation of Science and Technology Societies.

 

Abstract:

Nanofibers are one of the most advanced materials which can be easily designed with high performance materials having distinctive properties. In addition to fibers, nanoparticles (such as nanoclay) can be used to make unique formulations which can, in turn, be used to make conventional fibers for geotextiles and yarn-type geogrids. As an example of nanocomposite geo-synthetics in geo-environmental applications, it is very important to eliminate the toxic and organic components of various waste leachate solutions. There is no such capability for the standard manufactured nonwoven geotextiles and needed is to manufacture the functional nonwoven geotextiles which can absorb the toxic and organic components that may be harmful to personal health and the environment. The general concept of nanotechnology formulations used to manufacture geotextiles is introduced in this paper. Separation and filtration functions using geotextiles from nanoclay formulations are introduced as an important concept. For an example of nanoclay formulations used to manufacture geotextiles, yellow clay as nanoparticles were added to make a polyester formulation in turn to make nonwoven geotextiles to improve the removal effects of toxic and organic components of leachate solutions. Engineering test behavior was evaluated to confirm the effects of yellow clay addition. Finally, the possibility of nanocomposite formulations for geo-synthetics is considered in a number of common situations.